Volatile Metal Alkylamides Serve as Precursors for Vapor Deposition of High-Dielectric-Constant Gate Insulator Materials

Research output: Contribution to journalArticle

Original languageEnglish (US)
Pages (from-to)660-661
Number of pages2
JournalMRS Bulletin
Volume26
Issue number9
DOIs
StatePublished - 2001
Externally publishedYes

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Physical and Theoretical Chemistry

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