Volatile Metal Alkylamides Serve as Precursors for Vapor Deposition of High-Dielectric-Constant Gate Insulator Materials

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@article{4428ad757db74de3ae312c4a1b85cb79,

title = "Volatile Metal Alkylamides Serve as Precursors for Vapor Deposition of High-Dielectric-Constant Gate Insulator Materials",

author = "Maye, {Mathew M.}",

year = "2001",

month = sep,

doi = "10.1557/mrs2001.185",

language = "English (US)",

volume = "26",

pages = "660--661",

journal = "MRS Bulletin",

issn = "0883-7694",

publisher = "Springer International Publishing AG",

number = "9",

}

TY - JOUR

T1 - Volatile Metal Alkylamides Serve as Precursors for Vapor Deposition of High-Dielectric-Constant Gate Insulator Materials

AU - Maye, Mathew M.

PY - 2001/9

Y1 - 2001/9

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U2 - 10.1557/mrs2001.185

DO - 10.1557/mrs2001.185

M3 - Article

AN - SCOPUS:85011523953

SN - 0883-7694

VL - 26

SP - 660

EP - 661

JO - MRS Bulletin

JF - MRS Bulletin

IS - 9

ER -