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Transfer Port for Movement of Materials Between Clean Rooms
John F. Barrows (Inventor)
Department of Mechanical & Aerospace Engineering
Research output
:
Patent
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Keyphrases
Cleanroom
100%
Laminar Airflow
22%
Split-type
11%
Car Door
11%
Cleanliness Level
11%
Clean Gas
11%
HEPA Filter
11%
Engineering
Clean Rooms
100%