A transfer port facilitates transfer of a material between clean room modules, and/or between a clean room module and a clean box transporter that can travel through the contaminated ambient environment. A transfer port permits transfer of clean material between Class 1 clean rooms without degrading their cleanliness levels. The clean box transporter cars each comprise a small self-propelled clean room with laminar air flow and a HEPA filter. A door on the clean box mates against a similar door on one wall of the clean room module. A seal between a transporter car door and its opening, and a seal between a clean room door and its opening, a pair of seals disposed inside and outside a split line together define a limited contaminated volume. This volume is evacuated and/or flushed with clean gas to remove as much particulate matter as possible. The clean box transporter car has a slight overpressure with respect to the clean room module so when the transporter port is opened, any remaining particles will move away from the opening and into the clean room module, where they are entrained away in its laminar air flow and filtered out.
|Original language||English (US)|
|State||Published - Jan 20 2004|