Thin-film thermocouple gauge

T. C. Kuo; J. Flattery; P. K. Ghosh; P. G. Kornreich

doi:10.1116/1.575664

Thin-film thermocouple gauge

T. C. Kuo, J. Flattery, P. K. Ghosh, P. G. Kornreich

Research output: Contribution to journal › Article › peer-review

5 Scopus citations

Abstract

The importance of the thermocouple gauge in vacuum technology is well established. In this paper we present the fabrication and the calibration of a miniature thermocouple gauge using Cu-Cr thin films. The thermocouple gauge consists of a thin-film Cr heater and a thin-film Cu-Cr differential thermocouple on a glass substrate. The thin-film Cu-Cr thermocouple was calibrated using a standard K-type thermocouple. At constant temperature the change in the input power is a monotonic function of the change in the pressure. The measurement was repeated for several gases at a constant heater temperature of 100 °C. Experimental results show that our device can be used for a wide range of measurements. Owing to its small size, fabrication simplicity, and compatability with the existing thin-film processing it is rather easy to incorporate our device with other integrated circuits.

Original language	English (US)
Pages (from-to)	1150-1152
Number of pages	3
Journal	Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume	6
Issue number	3
DOIs	https://doi.org/10.1116/1.575664
State	Published - May 1988
Externally published	Yes

ASJC Scopus subject areas

Condensed Matter Physics
Surfaces and Interfaces
Surfaces, Coatings and Films

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AU - Flattery, J.

AU - Ghosh, P. K.

AU - Kornreich, P. G.

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AB - The importance of the thermocouple gauge in vacuum technology is well established. In this paper we present the fabrication and the calibration of a miniature thermocouple gauge using Cu-Cr thin films. The thermocouple gauge consists of a thin-film Cr heater and a thin-film Cu-Cr differential thermocouple on a glass substrate. The thin-film Cu-Cr thermocouple was calibrated using a standard K-type thermocouple. At constant temperature the change in the input power is a monotonic function of the change in the pressure. The measurement was repeated for several gases at a constant heater temperature of 100 °C. Experimental results show that our device can be used for a wide range of measurements. Owing to its small size, fabrication simplicity, and compatability with the existing thin-film processing it is rather easy to incorporate our device with other integrated circuits.

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Thin-film thermocouple gauge

Abstract

ASJC Scopus subject areas

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