Thin-film thermocouple gauge

T. C. Kuo, J. Flattery, P. K. Ghosh, P. G. Kornreich

Research output: Contribution to journalArticle

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Abstract

The importance of the thermocouple gauge in vacuum technology is well established. In this paper we present the fabrication and the calibration of a miniature thermocouple gauge using Cu-Cr thin films. The thermocouple gauge consists of a thin-film Cr heater and a thin-film Cu-Cr differential thermocouple on a glass substrate. The thin-film Cu-Cr thermocouple was calibrated using a standard K-type thermocouple. At constant temperature the change in the input power is a monotonic function of the change in the pressure. The measurement was repeated for several gases at a constant heater temperature of 100 °C. Experimental results show that our device can be used for a wide range of measurements. Owing to its small size, fabrication simplicity, and compatability with the existing thin-film processing it is rather easy to incorporate our device with other integrated circuits.

Original languageEnglish (US)
Pages (from-to)1150-1152
Number of pages3
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume6
Issue number3
DOIs
StatePublished - May 1988

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ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

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