The chemical vapor deposition of metal boride thin films from polyhedral cluster species

John A. Glass, Shreyas S. Kher, Yexin Tan, James T. Spencer

Research output: Contribution to journal › Article › peer-review

ASJC Scopus subject areas

@article{2c73ae1cf50744dd8b98b9dc0cf57767,

title = "The chemical vapor deposition of metal boride thin films from polyhedral cluster species",

author = "Glass, {John A.} and Kher, {Shreyas S.} and Yexin Tan and Spencer, {James T.}",

year = "1999",

language = "English (US)",

volume = "727",

pages = "130--143",

journal = "ACS Symposium Series",

issn = "0097-6156",

publisher = "American Chemical Society",

}

TY - JOUR

T1 - The chemical vapor deposition of metal boride thin films from polyhedral cluster species

AU - Glass, John A.

AU - Kher, Shreyas S.

AU - Tan, Yexin

AU - Spencer, James T.

PY - 1999

Y1 - 1999

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M3 - Article

AN - SCOPUS:0041911542

SN - 0097-6156

VL - 727

SP - 130

EP - 143

JO - ACS Symposium Series

JF - ACS Symposium Series

ER -