The chemical vapor deposition of metal boride thin films from polyhedral cluster species

John A. Glass, Shreyas S. Kher, Yexin Tan, James T. Spencer

Research output: Contribution to journalArticlepeer-review

4 Scopus citations
Original languageEnglish (US)
Pages (from-to)130-143
Number of pages14
JournalACS Symposium Series
StatePublished - 1999

ASJC Scopus subject areas

  • General Chemistry
  • General Chemical Engineering

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