PHOTOCHEMICAL LITHOGRAPHY OF SILICONE ELASTOMERS.

G. C. Martin, T. T. Su, P. Kornreich, S. T. Kowel

Research output: Contribution to journalConference articlepeer-review

Abstract

A new area of polymer technology is the use of low modulus elastomeric materials in microelectronic devices. The large deformations in these polymers with temperature, composition, and electric field lead to possible applications as transducers, switching systems, or tunable optical lenses. A variety of optical components such as the Ruticon has been developed using elastomers in which the polymer functions as an optical memory device. In this study, the structure and properties of crosslinked silicone polymers and their application as microelectronic components were explored. The primary objective was the creation of a two-dimensional array consisting of a metal film overlaid with a deformable polymer network and a reflecting metal film. The specific goals of the research were (1) to investigate the preparation and characterization of polymer gels for electronic applications, (2) to develop techniques for the lithography of these materials, and (3) to determine the effects of electric field on the viscoelastic behavior of the components.

Original languageEnglish (US)
Pages (from-to)390-394
Number of pages5
JournalAmerican Chemical Society, Division of Organic Coatings and Plastics Chemistry, Preprints
Volume43
StatePublished - Jan 1 1980
EventPap Presented at the ACS Natl Meet, 180th - San Francisco, CA, USA
Duration: Aug 24 1980Aug 29 1980

ASJC Scopus subject areas

  • Engineering(all)

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