Optical characteristics of electrochemically fabricated porous silicon microcavities

Ahmad A. Kanan, Prasanta K. Ghosh

Research output: Contribution to journalConference articlepeer-review

Abstract

In this experiment, the optical characteristics of porous silicon microcavities (PSM) are studied using spectroscopy analysis. Porous silicon microcavities were fabricated by the anodization of boron doped P-type (111) single crystal wafers in hydrofluoric acid/ethanol (HF/EtOH) electrolytes. The samples were prepared at room temperature under different fabrication conditions in order to obtain different physical parameters such as porosity (p), thickness (d), and pore geometry. The current density was varied from 25mA/cm 2 to 100mA/cm 2 and the HF/EtOH concentration was varied from 1:1 to 1:4. The transmission spectra of the prepared samples were investigated over the range of 800 nm to 2400 nm with a period of 2 seconds. The fabricated PSM structures were investigated using SEM and their physical properties were analyzed as a function of the fabrication parameters. The transmission spectra of the prepared samples were compared to the transmission spectra of the reference bulk silicon wafer. We observed that the refractive index of the (PSM) was lower than that of bulk silicon, and it decreased with increasing porosity (p). Based on the experimental spectra of the PSM structure, we report a spectral density function relating the physical properties of the surface and the effective dielectric function.

Original languageEnglish (US)
Article number100
Pages (from-to)609-617
Number of pages9
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume5593
DOIs
StatePublished - Dec 1 2004
EventNanosensing Materials and Devices - Philadelphia, PA, United States
Duration: Oct 25 2004Oct 28 2004

Keywords

  • Microcavities
  • Pore geometry
  • Porous silicon

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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