TY - JOUR
T1 - Modeling of the temperature field in nanosecond pulsed laser ablation of single crystalline diamond
AU - Zhang, Zhen
AU - Zhang, Quanli
AU - Wang, Yeqing
AU - Xu, Jiuhua
N1 - Funding Information:
The work was supported by the National Natural Science Foundation of China for Creative Research Groups (Project No. 51921003 ), the National Natural Science Foundation of China (NSFC) (Project No.: 51805257 ), the Natural Science Foundation of Jiangsu Province (Project No.: BK20201298 ), the China Postdoctoral Science Foundation funded project (Project No.: 2019TQ0151 ), and the Postgraduate Research & Practice Innovation Program of Jiangsu Province (Project No.: KYCX19_0162 ).
Publisher Copyright:
© 2021 Elsevier B.V.
PY - 2021/6
Y1 - 2021/6
N2 - In this paper, a comprehensive finite element (FE) simulation model of the heat transfer for laser ablation of a single crystalline diamond (SCD) with a scanning laser beam in Gaussian shape is developed. The model takes into account the material properties, the geometric structure, and the thermal boundary conditions. It is employed to study the dependence of the temperature distribution under varying laser machining parameters. The distribution characteristics of the temperature field, the temperature evolution, and the heat conduction on the diamond surface are obtained, analyzed, and discussed. The law describing the influence of the laser parameters on the temperature field on the diamond surface is established. After comparing the numerically estimated thermal penetration depth of the pulsed laser in the diamond with the experimentally ablated groove characterized by a scanning electron microscope (SEM), a white light interferometer (WLI) and the Raman spectroscopy analysis of the deposited metamorphic layer, it is found that the developed model shows an excellent predictive capability and provides a promising tool for the future optimization of the machining parameters.
AB - In this paper, a comprehensive finite element (FE) simulation model of the heat transfer for laser ablation of a single crystalline diamond (SCD) with a scanning laser beam in Gaussian shape is developed. The model takes into account the material properties, the geometric structure, and the thermal boundary conditions. It is employed to study the dependence of the temperature distribution under varying laser machining parameters. The distribution characteristics of the temperature field, the temperature evolution, and the heat conduction on the diamond surface are obtained, analyzed, and discussed. The law describing the influence of the laser parameters on the temperature field on the diamond surface is established. After comparing the numerically estimated thermal penetration depth of the pulsed laser in the diamond with the experimentally ablated groove characterized by a scanning electron microscope (SEM), a white light interferometer (WLI) and the Raman spectroscopy analysis of the deposited metamorphic layer, it is found that the developed model shows an excellent predictive capability and provides a promising tool for the future optimization of the machining parameters.
KW - Heat transfer
KW - Nanosecond pulsed laser ablation
KW - Single crystalline diamond
KW - Temperature field modeling
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U2 - 10.1016/j.diamond.2021.108402
DO - 10.1016/j.diamond.2021.108402
M3 - Article
AN - SCOPUS:85105690461
SN - 0925-9635
VL - 116
JO - Diamond and Related Materials
JF - Diamond and Related Materials
M1 - 108402
ER -