Mid-IR evanescent-wave sensors for tiny biological samples

Sergey V. Shilov, Mark S. Braiman, Li Zhi Mi

Research output: Contribution to journalConference Articlepeer-review

3 Scopus citations


We have developed methods for embedding miniature planar IR sensor elements flush at the surface of rigid substrates. The planar Ge waveguides have thicknesses down to approximately 10 micron, and widths of 0.5-1 mm. These waveguides are tapered in thickness along their 50-mm lengths to permit efficient coupling of light into the approximately 10 micron sensing region without requiring an IR microscope. The waveguides can therefore be positioned with their sensor surface horizontal. Such waveguides can be used as mid-IR evanescent-wave sensor elements for small biological samples. They display exquisite sensitivity to small numbers of analyte molecules at their surface. It is possible to collect high-throughput broadband spectra, e.g. of tiny liquid droplets or membranes of individual cells, in a matter of seconds.

Original languageEnglish (US)
Pages (from-to)202-207
Number of pages6
JournalProceedings of SPIE - The International Society for Optical Engineering
StatePublished - 2000
EventBiomedical Spectroscopy: Vibrational Spectroscopy and other Novel Techniques - San Jose, CA, USA
Duration: Jan 26 2000Jan 27 2000

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


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