LASER LITHOGRAPHY OF SILICONE POLYMERS.

I. H. Loh, G. C. Martin, S. T. Kowel, P. Kornreich

Research output: Contribution to journalConference article

1 Scopus citations
Original languageEnglish (US)
Pages (from-to)195-196
Number of pages2
JournalAmerican Chemical Society, Polymer Preprints, Division of Polymer Chemistry
Volume23
Issue number2
StatePublished - Sep 1 1982

ASJC Scopus subject areas

  • Polymers and Plastics

Cite this

Loh, I. H., Martin, G. C., Kowel, S. T., & Kornreich, P. (1982). LASER LITHOGRAPHY OF SILICONE POLYMERS. American Chemical Society, Polymer Preprints, Division of Polymer Chemistry, 23(2), 195-196.