LASER LITHOGRAPHY OF SILICONE POLYMERS.

I. H. Loh, G. C. Martin, S. T. Kowel, P. Kornreich

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)
Original languageEnglish (US)
Title of host publicationAmerican Chemical Society, Polymer Preprints, Division of Polymer Chemistry
PublisherACS, Div of Polym Chem
Pages195-196
Number of pages2
Volume23
Edition2
StatePublished - Sep 1982
Externally publishedYes

Fingerprint

Silicones
Lithography
Lasers
Polymers

ASJC Scopus subject areas

  • Polymers and Plastics

Cite this

Loh, I. H., Martin, G. C., Kowel, S. T., & Kornreich, P. (1982). LASER LITHOGRAPHY OF SILICONE POLYMERS. In American Chemical Society, Polymer Preprints, Division of Polymer Chemistry (2 ed., Vol. 23, pp. 195-196). ACS, Div of Polym Chem.

LASER LITHOGRAPHY OF SILICONE POLYMERS. / Loh, I. H.; Martin, G. C.; Kowel, S. T.; Kornreich, P.

American Chemical Society, Polymer Preprints, Division of Polymer Chemistry. Vol. 23 2. ed. ACS, Div of Polym Chem, 1982. p. 195-196.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Loh, IH, Martin, GC, Kowel, ST & Kornreich, P 1982, LASER LITHOGRAPHY OF SILICONE POLYMERS. in American Chemical Society, Polymer Preprints, Division of Polymer Chemistry. 2 edn, vol. 23, ACS, Div of Polym Chem, pp. 195-196.
Loh IH, Martin GC, Kowel ST, Kornreich P. LASER LITHOGRAPHY OF SILICONE POLYMERS. In American Chemical Society, Polymer Preprints, Division of Polymer Chemistry. 2 ed. Vol. 23. ACS, Div of Polym Chem. 1982. p. 195-196
Loh, I. H. ; Martin, G. C. ; Kowel, S. T. ; Kornreich, P. / LASER LITHOGRAPHY OF SILICONE POLYMERS. American Chemical Society, Polymer Preprints, Division of Polymer Chemistry. Vol. 23 2. ed. ACS, Div of Polym Chem, 1982. pp. 195-196
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