LASER LITHOGRAPHY OF SILICONE POLYMERS.

I. H. Loh, G. C. Martin, S. T. Kowel, P. Kornreich

Research output: Contribution to journal › Conference Article › peer-review

Original language	English (US)
Pages (from-to)	195-196
Number of pages	2
Journal	American Chemical Society, Polymer Preprints, Division of Polymer Chemistry
Volume	23
Issue number	2
State	Published - Sep 1982

ASJC Scopus subject areas

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title = "LASER LITHOGRAPHY OF SILICONE POLYMERS.",

author = "Loh, {I. H.} and Martin, {G. C.} and Kowel, {S. T.} and P. Kornreich",

year = "1982",

month = sep,

language = "English (US)",

volume = "23",

pages = "195--196",

journal = "American Chemical Society, Polymer Preprints, Division of Polymer Chemistry",

issn = "0032-3934",

number = "2",

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TY - JOUR

T1 - LASER LITHOGRAPHY OF SILICONE POLYMERS.

AU - Loh, I. H.

AU - Martin, G. C.

AU - Kowel, S. T.

AU - Kornreich, P.

PY - 1982/9

Y1 - 1982/9

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M3 - Conference Article

AN - SCOPUS:0020177870

SN - 0032-3934

VL - 23

SP - 195

EP - 196

JO - American Chemical Society, Polymer Preprints, Division of Polymer Chemistry

JF - American Chemical Society, Polymer Preprints, Division of Polymer Chemistry

IS - 2

ER -