Influence of master fabrication techniques on the characteristics of embossed microfluidic channels

Engineering & Materials Science

• Microfluidics 72%
• Silicon 53%
• Fabrication 50%
• Surface roughness 37%
• Wet etching 31%
• Reactive ion etching 30%
• Olefins 27%
• Reusability 25%
• Thermal expansion 23%
• Plastics 16%
• Polymers 16%
• Experiments 16%
• Substrates 16%

Medicine & Life Sciences

• Silicon 82%
• Microfluidics 82%
• Alkenes 35%
• Study Guides 32%
• Lab-On-A-Chip Devices 31%
• Plastics 22%
• Polymers 20%
• Ions 18%
• Hot Temperature 17%
• Research Personnel 15%

Chemical Compounds

• Embossing 100%
• Surface Roughness 68%
• Etching 61%
• Thermal Expansion Coefficient 39%
• Ion 13%
• Surface 10%
• Application 10%