Abstract
Surface modifications and improvements to piezoelectric-based sensors, such as QCMs and other piezoelectric devices, that significantly increase the sensitivity and the specificity (selectivity). These modifications can comprise mechanical and chemical changes to the surfaces of the sensors, either individually or together. For example, nanosize structures may be provided on the surface to improve sensitivity. Additionally, chemical coatings may be tethered to the surfaces, walls, or crystal to provide targeted sensitivity. Additionally, porous, layered and multiple senor arrays may be formed to enhance sensitivity and selectivity.
| Original language | English (US) |
|---|---|
| Patent number | 10,295,504 |
| State | Published - Mar 15 2018 |