Abstract
Experimental evidence for two regimes in the relationship of the defect density to the hydrogenation state of hydrogenated amorphous silicon (a-Si:H) is presented. A prevoius model for the defect density based on the two phases of bound hydrogen in a-Si:H is shown to account for the measured relationship.
Original language | English (US) |
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Pages (from-to) | 1493-1496 |
Number of pages | 4 |
Journal | Physical Review Letters |
Volume | 66 |
Issue number | 11 |
DOIs | |
State | Published - 1991 |
ASJC Scopus subject areas
- General Physics and Astronomy