Abstract
A method of fabricating horizontally-aligned zinc-oxide (ZnO) nanowire (NW) arrays with full control over the width and length is demonstrated. SEM images reveal the hexagonal structure typical of zinc oxide NWs. Arrays of high-aspect ratio horizontal ZnO NWs are fabricated by making use of the lateral overgrowth from dot patterns created by electron beam lithography (EBL). An array of patterned wires are lifted off and transferred to a flexible PDMS substrate with possible applications in several key nanotechnology areas.
Original language | English (US) |
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Pages (from-to) | 6880-6885 |
Number of pages | 6 |
Journal | Journal of Nanoscience and Nanotechnology |
Volume | 11 |
Issue number | 8 |
DOIs | |
State | Published - Aug 2011 |
Externally published | Yes |
Keywords
- E-beam lithography
- High-Aspect ratio
- Horizontally-aligned
- Nanowire
- PDMS
- Patterning
- Zinc oxide
ASJC Scopus subject areas
- Bioengineering
- General Chemistry
- Biomedical Engineering
- General Materials Science
- Condensed Matter Physics