Fabrication and calibration of integrated Cu-Cr thermocouple gauge

T. C. Kuo, J. Flattery, P. K. Ghosh, P. G. Kornreich

Research output: Contribution to journalArticle

Abstract

We report here the design, fabrication, and testing of an integrated thermocouple gauge. The gauge uses a thin-film Cr heater and a thin-film Cu-Cr differential thermocouple on a 5- × 3-mm glass substrate. The thermocouple measures the difference between the heater and the substrate temperature. Calibration of the thin-film Cu-Cr thermocouple gauge was done by using a standard K-type thermocouple as reference. At a constant difference temperature the measured power input to the heater is a function of the surrounding vapor pressure. The thermocouple gauge was calibrated using a McLeod gauge with He, Ar, N2, H2O, and CO2 gases. Our measurements show that the range of the gauge can possibly be extended to the μTorr range. This gauge uses a standard thin-film processing technique for fabrication resulting in a lower cost of production. Also, small size makes this gauge versatile and unique in comparison to many commercial gauges.

Original languageEnglish (US)
Pages (from-to)2304-2306
Number of pages3
JournalReview of Scientific Instruments
Volume59
Issue number10
DOIs
StatePublished - Dec 1 1988

ASJC Scopus subject areas

  • Instrumentation

Fingerprint Dive into the research topics of 'Fabrication and calibration of integrated Cu-Cr thermocouple gauge'. Together they form a unique fingerprint.

Cite this