Epitaxial growth with phosphorus 4. Application of dichloro-t-butylphosphine to CVD processes: The thermal chemical vapor deposition formation of copper phosphide thin films and etching of indium phosphide by dichloro-t-butylphosphine [1]

John A. Glass, James T. Spencer

Research output: Contribution to journal › Article › peer-review

1 Scopus citations

Fingerprint

Dive into the research topics of 'Epitaxial growth with phosphorus 4. Application of dichloro-t-butylphosphine to CVD processes: The thermal chemical vapor deposition formation of copper phosphide thin films and etching of indium phosphide by dichloro-t-butylphosphine [1]'. Together they form a unique fingerprint.

Keyphrases

Chemical Engineering

Earth and Planetary Sciences