Electron mobility-lifetime product and D° defect density in hydrogenated amorphous silicon

Engineering & Materials Science

• Electron mobility 100%
• Defect density 91%
• Amorphous silicon 87%
• Electrons 64%
• Defects 43%
• Paramagnetic resonance 43%
• Silanes 40%
• Argon 36%
• Dilution 34%
• Substrates 22%
• Geometry 19%

Physics & Astronomy

• electron mobility 65%
• amorphous silicon 58%
• life (durability) 43%
• products 40%
• defects 35%
• soaking 26%
• silanes 23%
• dilution 21%
• electron paramagnetic resonance 19%
• electrons 17%
• argon 16%
• trapping 16%
• reactors 16%
• geometry 11%
• temperature 6%

Chemical Compounds

• Amorphous Silicon 86%
• Electron Particle 34%
• Silane 30%
• Dilution 25%
• Compound Mobility 24%