@article{77538bc4aa4541dfacd87ff19bab877c,
title = "Chemical vapor deposition precursor chemistry 1: The deposition of pure aluminum thin films from an aluminaborane precursor compound by chemical vapor deposition",
author = "Glass, {John A.} and Shreyas Kher and Spencer, {James T.}",
year = "1992",
month = jan,
day = "30",
doi = "10.1016/0040-6090(92)90093-Q",
language = "English (US)",
volume = "207",
pages = "15--18",
journal = "Thin Solid Films",
issn = "0040-6090",
publisher = "Elsevier",
number = "1-2",
}