@inbook{178ddbbf24de4926b414a5a96eacfe6f,
title = "Chemical Vapor Deposition of Metal-Containing Thin-Film Materials from Organometallic Compounds",
keywords = "Chemical vapor deposition, Organometallic source compounds, Photolytic deposition processes, Plasma-assisted processes, Pyrolytic deposition processes",
author = "Spencer, {James T.}",
year = "2007",
month = jan,
day = "29",
doi = "10.1002/9780470166420.ch3",
language = "English (US)",
isbn = "9780471596998",
volume = "41",
pages = "145--237",
booktitle = "Progress in Inorganic Chemistry",
publisher = "Wiley",
}