Chemical Vapor Deposition of Metal-Containing Thin-Film Materials from Organometallic Compounds

Research output: Chapter in Book/Report/Conference proceedingChapter

22 Scopus citations
Original languageEnglish (US)
Title of host publicationProgress in Inorganic Chemistry
PublisherWiley
Pages145-237
Number of pages93
Volume41
ISBN (Electronic)9780470166420
ISBN (Print)9780471596998
DOIs
StatePublished - Jan 29 2007

Keywords

  • Chemical vapor deposition
  • Organometallic source compounds
  • Photolytic deposition processes
  • Plasma-assisted processes
  • Pyrolytic deposition processes

ASJC Scopus subject areas

  • Chemistry(all)

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