Chemical vapor deposition of metal borides, 4: The application of polyhedral boron clusters to the chemical vapor deposition formation of gadolinium boride thin-film materials

Shreyas S. Kher, Yexin Tan, James T Spencer

Research output: Contribution to journalArticle

6 Scopus citations

Abstract

The chemical vapor deposition of high-quality polycrystalline thin films of gadolinium hexaboride, GdB6, was achieved through the vacuum copyrolysis of gas-phase boron hydride clusters, such as nido-pentaborane(9) [B5H9] and nido-decaborane(14) [B10H14], and gadolinium(III) chloride. These films typically displayed deep blue colors, were very hard and adhered very well to most deposition substrates. Depositions were carried out on a variety of substrates including quartz, copper, silicon, SiO2 and ceramic materials. X-ray diffraction and scanning electron microscopic data showed the formation of highly crystalline materials with a strongly preferred orientation in the (111) direction. Attempted depositions of gadolinium boride films on CaF2(111) resulted in the apparent formation of a ternary (Ca/Gd)B6 phase in which the calcium is presumably substituted for gadolinium atoms in the cubic GdB6 structure. The gadolinium boride thin films were investigated by scanning electron microscopy (SEM), X-ray emission spectroscopy (XES), X-ray diffraction (XRD), and glow-discharge mass spectrometry (GDMS). GDMS showed that the GdB6 films were relatively uniform in composition in the bulk material.

Original languageEnglish (US)
Pages (from-to)297-304
Number of pages8
JournalApplied Organometallic Chemistry
Volume10
Issue number3-4
StatePublished - Apr 1996

    Fingerprint

Keywords

  • Chemical vapor deposition
  • Gadolinium hexaboride
  • Mass spectrometry
  • Scanning electro microscopy
  • Thin films
  • X-ray diffraction
  • X-ray emission spectroscopy

ASJC Scopus subject areas

  • Chemistry (miscellaneous)
  • Inorganic Chemistry

Cite this