AFM/SEM study of thermally induced hillock coalescence

Joseph Chaiken, Jerry Goodisman, R. M. Villarica, J. V. Beasock, L. H. Walsh

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

The growth of hillocks and voids in metal films was studied. The applicability of a model involving fractals and kinetic equations was examined on the basis of whether there is independent justification for using scaling arguments in the model and whether there is reason to connect the evolution of hillocks with that of voids. Hillocks and voids were found to be self-similar across about three orders of magnitude of variation in spatial scale with the same fractal dimension. Voids and hillocks were found to have the same fractal dimension whether studied using atomic force microscopy (AFM) or scanning electron microscopy (SEM). The parameters obtained from these fractal analyses demonstrate quantitative internal consistency with an earlier time dependent study of thermal annealing effects on hillock distributions. Remarkably, area-perimeter data obtained from either a long-time study of a single void or a spatial average of a large number of different voids both yield quantitatively identical results.

Original languageEnglish (US)
Title of host publicationMaterials Research Society Symposium - Proceedings
PublisherMaterials Research Society
Pages489-494
Number of pages6
Volume356
StatePublished - 1995
EventProceedings of the 1994 MRS Fall Meeting - Boston, MA, USA
Duration: Nov 28 1994Dec 1 1994

Other

OtherProceedings of the 1994 MRS Fall Meeting
CityBoston, MA, USA
Period11/28/9412/1/94

Fingerprint

Fractal dimension
Coalescence
Fractals
Atomic force microscopy
Time and motion study
Scanning electron microscopy
Metals
Annealing
Kinetics
Hot Temperature

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials

Cite this

Chaiken, J., Goodisman, J., Villarica, R. M., Beasock, J. V., & Walsh, L. H. (1995). AFM/SEM study of thermally induced hillock coalescence. In Materials Research Society Symposium - Proceedings (Vol. 356, pp. 489-494). Materials Research Society.

AFM/SEM study of thermally induced hillock coalescence. / Chaiken, Joseph; Goodisman, Jerry; Villarica, R. M.; Beasock, J. V.; Walsh, L. H.

Materials Research Society Symposium - Proceedings. Vol. 356 Materials Research Society, 1995. p. 489-494.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Chaiken, J, Goodisman, J, Villarica, RM, Beasock, JV & Walsh, LH 1995, AFM/SEM study of thermally induced hillock coalescence. in Materials Research Society Symposium - Proceedings. vol. 356, Materials Research Society, pp. 489-494, Proceedings of the 1994 MRS Fall Meeting, Boston, MA, USA, 11/28/94.
Chaiken J, Goodisman J, Villarica RM, Beasock JV, Walsh LH. AFM/SEM study of thermally induced hillock coalescence. In Materials Research Society Symposium - Proceedings. Vol. 356. Materials Research Society. 1995. p. 489-494
Chaiken, Joseph ; Goodisman, Jerry ; Villarica, R. M. ; Beasock, J. V. ; Walsh, L. H. / AFM/SEM study of thermally induced hillock coalescence. Materials Research Society Symposium - Proceedings. Vol. 356 Materials Research Society, 1995. pp. 489-494
@inproceedings{8eb894d486d044caad1aa35529c74fcf,
title = "AFM/SEM study of thermally induced hillock coalescence",
abstract = "The growth of hillocks and voids in metal films was studied. The applicability of a model involving fractals and kinetic equations was examined on the basis of whether there is independent justification for using scaling arguments in the model and whether there is reason to connect the evolution of hillocks with that of voids. Hillocks and voids were found to be self-similar across about three orders of magnitude of variation in spatial scale with the same fractal dimension. Voids and hillocks were found to have the same fractal dimension whether studied using atomic force microscopy (AFM) or scanning electron microscopy (SEM). The parameters obtained from these fractal analyses demonstrate quantitative internal consistency with an earlier time dependent study of thermal annealing effects on hillock distributions. Remarkably, area-perimeter data obtained from either a long-time study of a single void or a spatial average of a large number of different voids both yield quantitatively identical results.",
author = "Joseph Chaiken and Jerry Goodisman and Villarica, {R. M.} and Beasock, {J. V.} and Walsh, {L. H.}",
year = "1995",
language = "English (US)",
volume = "356",
pages = "489--494",
booktitle = "Materials Research Society Symposium - Proceedings",
publisher = "Materials Research Society",

}

TY - GEN

T1 - AFM/SEM study of thermally induced hillock coalescence

AU - Chaiken, Joseph

AU - Goodisman, Jerry

AU - Villarica, R. M.

AU - Beasock, J. V.

AU - Walsh, L. H.

PY - 1995

Y1 - 1995

N2 - The growth of hillocks and voids in metal films was studied. The applicability of a model involving fractals and kinetic equations was examined on the basis of whether there is independent justification for using scaling arguments in the model and whether there is reason to connect the evolution of hillocks with that of voids. Hillocks and voids were found to be self-similar across about three orders of magnitude of variation in spatial scale with the same fractal dimension. Voids and hillocks were found to have the same fractal dimension whether studied using atomic force microscopy (AFM) or scanning electron microscopy (SEM). The parameters obtained from these fractal analyses demonstrate quantitative internal consistency with an earlier time dependent study of thermal annealing effects on hillock distributions. Remarkably, area-perimeter data obtained from either a long-time study of a single void or a spatial average of a large number of different voids both yield quantitatively identical results.

AB - The growth of hillocks and voids in metal films was studied. The applicability of a model involving fractals and kinetic equations was examined on the basis of whether there is independent justification for using scaling arguments in the model and whether there is reason to connect the evolution of hillocks with that of voids. Hillocks and voids were found to be self-similar across about three orders of magnitude of variation in spatial scale with the same fractal dimension. Voids and hillocks were found to have the same fractal dimension whether studied using atomic force microscopy (AFM) or scanning electron microscopy (SEM). The parameters obtained from these fractal analyses demonstrate quantitative internal consistency with an earlier time dependent study of thermal annealing effects on hillock distributions. Remarkably, area-perimeter data obtained from either a long-time study of a single void or a spatial average of a large number of different voids both yield quantitatively identical results.

UR - http://www.scopus.com/inward/record.url?scp=0029226713&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0029226713&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:0029226713

VL - 356

SP - 489

EP - 494

BT - Materials Research Society Symposium - Proceedings

PB - Materials Research Society

ER -