A novel restricted-flow etching method for glass

Hai Bo Xie, Yi Zheng, Yu Run Fan, Xin Fu, Hua Yong Yang

Research output: Contribution to journalArticlepeer-review

2 Scopus citations


This paper presents a novel micro fabrication method based on the laminar characteristics of micro-scale flows. Therein the separator and etchant are alternatively arranged in micro channels to form multiple laminar streams, and the etchant is located at the site where the reaction is supposed to occur. This new micro fabrication process can be used for the high aspect ratio etching inside a microchannel on glass substrates. Furthermore, the topography of microstructure patterned by this method can be controlled by changing the flow parameters of the separator and etchant. Experiments on the effects of flow parameters on the aspect ratio, side wall profile and etching rate were carried out on a glass substrate. The effect of flow rates on the etching rate and the micro topography was analyzed. In addition, experiments with dynamical changes of the flow rate ratio of the separator and etchant showed that the verticality of the side walls of microstructures can be significantly improved. The restricted flowing etching technique not only abates the isotropic effect in the traditional wet etching but also significantly reduces the dependence on expensive photolithographic equipment.

Original languageEnglish (US)
Pages (from-to)1601-1608
Number of pages8
JournalJournal of Zhejiang University: Science A
Issue number11
StatePublished - 2009
Externally publishedYes


  • Etching
  • Laminar flow
  • Micro fabrication
  • Microfluidics

ASJC Scopus subject areas

  • General Engineering


Dive into the research topics of 'A novel restricted-flow etching method for glass'. Together they form a unique fingerprint.

Cite this